Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates
AssigneePfeiffer Vacuum GmbH
InventorsJulien Palisson, Catherine Le Guet
Life of this patent
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Abstract
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.
Claims11
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, the method comprising:
- at least one plasma treatment, selected to remove contaminating molecules from at least one interior wall of the transport box via chemical action or mechanical action, the at least one plasma treatment comprising applying a plasma of a treatment gas at a gas pressure lower than 10,000 pascals,
- wherein, in the at least one plasma treatment, at least the interior wall of the transport box is heated to a temperature in a range from above 50° C. to less than 100° C.;
- and
- a non-plasma treatment in which at least the interior wall of the transport box is subjected to combined action of a gas pressure lower than 10,000 pascals and heating to a temperature above 50° C.
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, the method comprising:
- at least one plasma treatment, selected to remove contaminating molecules from at least one interior wall of the transport box via chemical action or mechanical action, the at least one plasma treatment comprising applying a plasma of a treatment gas at a gas pressure lower than 10,000 pascals;
- and
- a non-plasma treatment in which the at least one interior wall of the transport box is subjected to combined action of a gas pressure lower than 10,000 pascals and heating to a temperature above 50° C.
Dependencies are inferred from the claim text.