# US 10,478,868 B2 · Method and apparatus for surface nanoparticle measurement > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,478,868 B2 - Document ID: US10478868B2 - Status: Granted - Kind: B2 - Application number: 15/349,443 - Filed: 2016-11-11 - Published: 2017-06-08 - Granted: 2019-11-19 - Earliest claimed: 2015-12-04 - Assignees: Applied Matierials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Thomas Nowak - Web page: https://patentgrep.com/patent/US10478868B2 ## CPC - B08B 5/02: Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)} - B08B 15/04: from a small area, e.g. a tool {(removing chips B23Q11/0042)} - G01N 1/2205: {with filters} - G01N 15/0618: {of the filter type (G01N15/0643 takes precedence)} - G01N 2015/1024: {Counting particles by non-optical means} - G01N 2015/1486: {Counting the particles} - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract Embodiments described herein generally relate to a particle collection apparatus and probe head for the collection of particles on process tool components. In one embodiment, a particle collection apparatus for counting particles present on a processing tool component is disclosed herein. The particle collection apparatus includes a particle collector. The particle collector is configured to scan a processing tool component and collect particles collected from the processing tool component. The particle collector includes a body and a probe head coupled to the body. The probe head has a probe body and a controlled spacing element. The controlled spacing element is coupled to the probe body and is configured to form a uniform manifold between the probe body and the processing tool component. ## Claims ### Claim 1 A particle collection apparatus for counting particles present on a processing tool component, the apparatus comprising: a particle collector configured to collect particles from the processing tool component, the particle collector comprising: a body; a probe head coupled to the body, the probe head having a probe body and a controlled spacing element, wherein the controlled spacing element is coupled to the probe body and is configured to form a manifold between the probe body and the processing tool component, wherein the controlled spacing element is a filter ring; and an ionizer mesh ring disposed in the manifold. ### Claim 2 (depends on 1) The particle collection apparatus of claim 1, wherein the probe body includes an extended section configured to decrease a volume in the manifold at positions beneath the extended section. ### Claim 3 (depends on 1) The particle collection apparatus of claim 1, wherein the probe body includes a reservoir ring. ### Claim 4 (depends on 1) The particle collection apparatus of claim 1, wherein a gas inlet is formed through the probe body. ### Claim 5 (depends on 4) The particle collection apparatus of claim 4, wherein the probe body includes a reservoir ring. ### Claim 6 (depends on 1) The particle collection apparatus of claim 1, further comprising: a test bench, wherein the particle collector is disposed over the test bench; and a power source coupled to the test bench, the power source configured to excite particles from a surface of the processing tool component. ### Claim 7 (depends on 1) The particle collection apparatus of claim 1, further comprising: a counter configured to collect particles from a surface of the processing tool component. ### Claim 8 (depends on 7) The particle collection apparatus of claim 7, wherein the probe body includes an extended section configured to decrease a volume in the manifold at positions beneath the extended section. ### Claim 9 (depends on 7) The particle collection apparatus of claim 7, wherein the probe body includes a reservoir ring. ### Claim 10 (depends on 1) The particle collection apparatus of claim 1, wherein the manifold further comprises: a sonic throat. ### Claim 11 (depends on 7) The particle collection apparatus of claim 7, wherein a gas inlet is formed through the probe body. ### Claim 12 A particle collection apparatus for counting particles present on a processing tool component, the apparatus comprising: a particle collector configured to collect particles from the processing tool component, the particle collector comprising: a body; a probe head coupled to the body, the probe head having a probe body and a controlled spacing element, wherein the controlled spacing element is coupled to the probe body and is configured to form a manifold between the probe body and the processing tool component, wherein the controlled spacing element is a filter ring having a plurality of holes, and wherein the plurality of holes are distributed asymmetrically around the circumference of the filter ring to create a turbulent gas flow; and an ionizer mesh ring disposed in the manifold; and a counter configured to count particles from a surface of the processing tool component. ### Claim 13 (depends on 12) The particle collection apparatus of claim 12, wherein the probe body includes an extended section configured to decrease a volume in the manifold at positions beneath the extended section. ### Claim 14 (depends on 12) The particle collection apparatus of claim 12, wherein an exhaust conduit is formed through the body and extends to the probe head, and the exhaust conduit is coupled to the counter. ### Claim 15 (depends on 14) The particle collection apparatus of claim 14, wherein the counter is configured to pump the particles from the particle collector and count the number of particles collected. ### Claim 16 A particle collection apparatus for counting particles present on a processing tool component, the apparatus comprising: a particle collector configured collect particles from the processing tool component, the particle collector comprising: a body; and a probe head coupled to the body, the probe head having a probe body and a controlled spacing element, wherein the controlled spacing element is coupled to the probe body and is configured to form a manifold between the probe body and the processing tool component, wherein the controlled spacing element is a filter ring; and an ionizer mesh ring disposed in the manifold; a counter configured to collect particles from a surface of the processing tool component; a test bench, wherein the particle collector is disposed over the test bench; and a power source coupled to the test bench, the power source configured to excite particles from the surface of the processing tool component. ### Claim 17 (depends on 16) The particle collection apparatus of claim 16, wherein an exhaust conduit is formed through the body and extends to the probe head, and the exhaust conduit is coupled to the counter.