# US 10,478,752 B2 · Chemical liquid tank

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- Number: US 10,478,752 B2
- Document ID: US10478752B2
- Status: Granted
- Kind: B2
- Application number: 15/065,189
- Filed: 2016-03-09
- Published: 2017-03-16
- Granted: 2019-11-19
- Earliest claimed: 2015-09-11
- Assignees: Toshiba Memory Corporation
- Applicants: Toshiba Memory Corporation
- Inventors: Masato Kurita
- Web page: https://patentgrep.com/patent/US10478752B2

## CPC

- B01D 19/00: Degasification of liquids
- B01D 19/0005: {with one or more auxiliary substances}
- G05D 9/12: characterised by the use of electric means
- B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28)
- G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

## Abstract

A chemical liquid tank has a container to store chemical liquid, a sensor to measure a height of a liquid surface by irradiating the chemical liquid stored in the container with an ultrasonic wave and measuring time until a reflected wave reflected from the liquid surface of the chemical liquid is received, and a gas jetting port to spray a gas toward a part of the liquid surface comprising an irradiation position of the ultrasonic wave in the container.

## Claims

### Claim 1

A chemical liquid tank, comprising:
a container to store chemical liquid;
a sensor to measure a height of a liquid surface of the chemical liquid stored in the container based on a time after irradiating the chemical liquid stored in the container with an ultrasonic wave and before sensing a reflected wave reflected from the liquid surface of the chemical liquid; and
a gas jetting port including a plurality of nozzles to jet a gas from the plurality of nozzles toward a part of the liquid surface, the part of the liquid surface comprising an irradiation position of the ultrasonic wave in the container; and
a guide member provided inside an outer wall surface of the container and to guide bubbles generated in the container,
wherein the sensor measures the height of the liquid surface when the bubbles generated in the container are removed from the irradiation position of the liquid surface by jetting the gas toward the part of the liquid surface.

### Claim 2 (depends on 1)

The chemical liquid tank according to claim 1, wherein
the outer wall surface of the container is a cylindrical shape,
the guide member comprises a cylindrical inner wall surface disposed inside and at an interval from the outer wall surface, and
the inner wall surface comprises a notch having a predetermined width and extending from the upper end portion to the lower end portion of the inner wall surface.

### Claim 3 (depends on 2)

The chemical liquid tank according to claim 2, wherein
the gas jetting port jets the gas in a manner that bubbles located in the part of the container move toward the notch.

### Claim 4 (depends on 3)

The chemical liquid tank according to claim 3, wherein
the guide member guides the bubbles, which have been pushed by the gas and reached the notch, along the inner wall surface.

### Claim 5 (depends on 1)

The chemical liquid tank according to claim 1, wherein
the gas jetted from the gas jetting port is any one of nitrogen, air, or an inert gas.

### Claim 6 (depends on 1)

The chemical liquid tank according to claim 1, wherein
the sensor and the gas jetting port are attached to different locations of an upper lid of the container.

### Claim 7 (depends on 1)

The chemical liquid tank according to claim 1, wherein
the container stores at least one type of the chemical liquid mixed with pure water, while regularly circulating the stored chemical liquid.

### Claim 8 (depends on 1)

The chemical liquid tank according to claim 1, wherein
the container stores the prepared chemical liquid, while regularly circulating the stored chemical liquid.