Method and device for generating electromagnetic radiation by means of a laser-produced plasma

A method for generating electromagnetic radiation by means of a laser-produced plasma, wherein

• a target (40) comprising a target material is provided,
• at least one pulse sequence (32) is directed to said target (40), wherein said pulse sequence (32) comprises at least three conditioning laser pulses (33), wherein time intervals (t1) between subsequent conditioning laser pulses (33) are 200 ns or less,
• a main laser pulse (34) is directed to said target (40) along a first axis (A1), such that a radiation-emitting plasma (50) is formed from at least a part of said target material;
• wherein said at least one pulse sequence (32) comprises at least one pre pulse sequence (32a) which is directed to said target (40) prior to said main laser pulse (33);
• wherein a cavity (41 is created in said target (40) by means of said at least one pre pulse sequence (32a), wherein said main laser pulse (34) is directed to an inside surface (42) of said cavity (41);
• and
• wherein said cavity (41) comprises a depth (d) along said first axis (A1) and a width (w) perpendicular to said first axis (A1), wherein the ratio between said depth (d) and said width (w) is from 100:1 to 1:100.