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US 10,477,322 B2Granted
MEMS device and process
AssigneeCirrus Logic, Inc.
InventorsAleksey Sergeyevich Khenkin, Tsjerk Hans Hoekstra
Life of this patent
Estimating the term…
Abstract
The application describes a MEMS transducer comprising: a substrate; a primary membrane supported in a fixed relation relative to the substrate and a secondary membrane provided in a plane overlying the primary membrane. The secondary membrane is mechanically coupled to the primary membrane by a substantially rigid coupling structure. A rigid support plate may be interposed between the primary and secondary membranes.
Claims21
A MEMS transducer comprising:
- a substrate comprising a cavity;
- a primary membrane, wherein the periphery of the primary membrane is supported in a fixed relation relative to the substrate so as to overlie the cavity;
- at least one secondary membrane provided in a plane overlying the primary membrane, wherein the secondary membrane is mechanically coupled to the primary membrane and wherein the periphery of the secondary membrane is not supported in a fixed relation relative to the substrate.
A MEMS transducer comprising:
- a substrate;
- a primary membrane supported in a fixed relation relative to the substrate;
- at least one secondary membrane provided in a plane overlying the primary membrane, wherein the secondary membrane is mechanically coupled to the primary membrane and is only indirectly supported relative to the substrate via the primary membrane.
A MEMS transducer comprising:
- a substrate;
- a primary membrane supported in a fixed relation relative to the substrate;
- at least one secondary membrane provided in a plane overlying the primary membrane, wherein the secondary membrane is mechanically coupled to the primary membrane and is mechanically coupled to the substrate only via the primary membrane.
Dependencies are inferred from the claim text.