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US 10,476,476 B2Granted
MEMS resonator with suppressed spurious modes
AssigneeMurata Manufacturing Co., Ltd.
InventorVille Kaajakari
Life of this patent
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Abstract
A MEMS resonator is provided with improved electrical characteristics and reduced spurious resonances. The MEMS resonator includes two or more first rectangular resonator plates with lengths greater than their respective widths. Moreover, the MEMS resonator includes two or more second rectangular resonator plates that are positioned parallel to the first resonator plates in the widthwise direction of the MEMS resonator. The length of the second resonator plates is different than the length of the first resonator plates to reduce spurious resonances.
Claims20
A microelectromechanical system (“MEMS”) resonator comprising:
- a plurality of first resonator plates each having a width W1 and a length L1, wherein the length L1>the width W1, and the plurality of first resonator plates have a pair of longer sides with a length equal to the length L1 and a pair of shorter sides with a length equal to width W1;
- and
- a plurality of second resonator plates each having a width W2 and a length L2, wherein the length L2>the width W2, and the plurality of second resonator plates have a pair of longer sides with a length equal to the length L2 and a pair of shorter sides with a length equal to width W2,
- wherein the plurality of first resonator plates and the plurality of second resonator plates are disposed parallel to each other in a widthwise direction of the MEMS resonator, with at least one longer side of each of the plurality of first and second resonator plates being coupled to at least one longer side of an adjacent resonator plate such that the first and second resonator plates are stacked in the widthwise direction,
- wherein at least a portion of the first and second resonator plates comprise respective anchoring points on the shorter sides of the respective resonator plate, such that the MEMS resonator is configured as a width extensional mode resonator, and
- wherein the length L1 is not equal to the length L2.
3 more elements
A microelectromechanical system (“MEMS”) resonator comprising:
- a plurality of inner resonator plates each having a width W1 and a length L1 that is greater than the width W1, wherein the inner resonator plates are disposed adjacent to each other along respective first longer sides of the inner resonator plates;
- and
- a plurality of outer resonator plates each having a width W2 and a length L2 that is greater than the width W2, wherein at least a pair of the outer resonator plates are disposed adjacent to respective second longer sides of a pair of the inner resonator plates,
- wherein the second sides of the pair of inner resonator plates are opposite the first sides, respectively, in the widthwise direction of the MEMS resonator, such that the first and second resonator plates are stacked in the widthwise direction,
- wherein at least a portion of the inner resonator plates comprise respective anchoring points on the shorter sides of the respective resonator plate, such that the MEMS resonator is configured as a width extensional mode resonator, and
- wherein the length L1 is not equal to the length L2.
3 more elements
A microelectromechanical system (“MEMS”) resonator comprising:
- a plurality of first resonator plates each being rectangular shaped and having a pair of longer sides with a length L1 and a pair of shorter sides with a width W1, wherein the length L1>the width W1;
- and
- a plurality of second resonator plates each having a pair of first sides extending in a direction parallel to each other and a pair of second sides connecting the pair of first sides, respectively, the pair of second sides not extending in a direction parallel to each other,
- wherein the plurality of first resonator plates and the plurality of second resonator plates are disposed parallel to each other in a widthwise direction of the MEMS resonator, with at least one longer side of each of the plurality of first and second resonator plates being coupled to at least one longer side of an adjacent resonator plate such that the first and second resonator plates are stacked in the widthwise direction, and
- wherein at least a portion of the plurality of first resonator plates comprise respective anchoring points on the shorter sides thereof, such that the MEMS resonator is configured as a width extensional mode resonator.
2 more elements
Dependencies are inferred from the claim text.