Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
AssigneeBoard of Trustees of the Univsity of Illinois
InventorsSongbin Gong, Yong-Ha Song
Life of this patent
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Abstract
A micro-resonator includes a first electrode positioned on a piezoelectric plate at a first end of the piezoelectric plate, the first electrode including a first set of fingers and a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate. The second electrode including a second set of fingers interdigitated with the first set of fingers with an overlapping distance without touching the first set of fingers, the overlapping distance being less than seven-tenths the length of one of the first set of fingers or the second set of fingers. At least one of the first end or the second end of the piezoelectric plate may define a curved shape.
Claims20
A micro-resonator comprising:
- a piezoelectric plate disposed on a bulk substrate, the bulk substrate defining a cavity under a released region of the piezoelectric plate;
- a first electrode positioned on the piezoelectric plate at a first end of the piezoelectric plate, the first electrode comprising:
- a first set of fingers extending from a first side of a first conductive bus;
- and
- a first triangular-shaped element extending from a second side of the first conductive bus opposite from the first side, the first triangular-shaped element connecting to either end of the first conductive bus to form a first pair of angles with respect to the first conductive bus, wherein each angle of the first pair of angles is less than or equal to 75 degrees;
- and
- a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate, the second electrode comprising a second set of fingers interdigitated with the first set of fingers with an overlapping distance, wherein the overlapping distance is less than seven-tenths a length of the released region of the piezoelectric plate.
A micro-resonator comprising:
- a piezoelectric plate disposed on a bulk substrate, the bulk substrate defining a cavity under a released region of the piezoelectric plate;
- a first electrode positioned on the piezoelectric plate at a first end of the piezoelectric plate, the first electrode comprising:
- a first set of fingers extending from a first side of a first conductive bus;
- and
- a first arched-shaped element extending from a second side of the first conductive bus opposite from the first side, the first arched-shaped element having curved ends that connect to either end of the first conductive bus;
- and
- a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate, the second electrode comprising a second set of fingers interdigitated with the first set of fingers.
A filter comprising:
- a piezoelectric plate disposed on a bulk substrate, the bulk substrate defining a cavity under a released region of the piezoelectric plate;
- an array including a first two-electrode micro-resonator and a second two-electrode micro-resonator, each comprising:
- a first electrode positioned on the piezoelectric plate at a first end of the piezoelectric plate, the first electrode connected to a first conductive bus and comprising:
- at least a first finger extending from a first side of the first conductive bus;
- and
- a first arched-shaped element extending from a second side of the first conductive bus opposite from the first side, the first arched-shaped element having curved ends that connect to either end of the first conductive bus;
- and
- a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate, the second electrode connected to a second conductive bus and comprising:
- at least a second finger extending from a first side of the second conductive bus and interdigitated with the at least first finger;
- and
- a second arched-shaped element extending from a second side of the second conductive bus opposite from the first side, the second arch-shaped element having curved ends that connect to either end of the first conductive bus;
- and
- a longitudinal gap defined in the piezoelectric plate between the first two-electrode micro-resonator and the second two-electrode micro-resonator.
Dependencies are inferred from the claim text.