Back to results
US 10,476,404 B2Granted
Row and column actuator control
AssigneeDigitalOptics Corporation
InventorRoman C. Gutierrez
Life of this patent
Estimating the term…
Abstract
In one embodiment, a device is provided that includes: a plurality of actuators arranged into a plurality of rows and a plurality of columns; a plurality of row conductors corresponding to the plurality of rows; a plurality of column conductors corresponding to the plurality of columns; and a controller configured to select at least one of the actuators in a row by raising a voltage on the corresponding row conductor to couple each selected actuator to its corresponding column conductor.
Claims20
A device comprising:
- a cascaded electrostatic actuator including a stack of cells in a substrate, each cell having an isolated plate formed from a respective portion of the substrate, each isolated plate being surrounded by a corresponding gap between the isolated plate and another portion of the substrate;
- and
- a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps by asserting a voltage on selected ones of the isolated plates;
- and wherein
- the portion of the substrate surrounding a corresponding isolated plate is deformed when the corresponding cell is actuated;
- the isolated plates are arranged in a plurality of rows and a plurality of columns;
- and
- the isolated plates of consecutive rows are arranged in a staggered configuration.
5 more elements
A device comprising:
- a cascaded electrostatic actuator including a stack of cells in a substrate, each cell having an isolated plate formed from a respective portion of the substrate, each isolated plate being surrounded by a corresponding gap between the isolated plate and another portion of the substrate;
- and
- means for independently and selectively actuating ones of the isolated plates to cause selected ones of the gaps to be opened or closed;
- and wherein
- the portion of the substrate surrounding a corresponding isolated plate is deformed when the corresponding isolated plate is actuated;
- the isolated plates are arranged in a plurality of rows and a plurality of columns;
- and
- the isolated plates of consecutive rows are arranged in a staggered configuration.
5 more elements
A cascaded electrostatic actuator comprising:
- a conductive substrate having an array of electrostatic cells formed therein, each of the electrostatic cells including a peripheral wall and an open middle portion formed by a respective portion of the substrate;
- a plurality of conductive isolated plates formed in the conductive substrate, each of the isolated plates being formed in the middle portion of an associated one of the electrostatic cells by another portion of the substrate such that a gap surrounds the isolated plate;
- a plurality of control conductors selectively coupled to the plurality of isolated plates, each of the plurality of control conductors being configured to apply a voltage to an associated one of the isolated plates when selectively coupled thereto, whereby application of the voltage causes the substrate to deform and reduce the gap around at least a portion of the associated isolated plate, by creating an attractive force between the peripheral wall and the isolated plate;
- and wherein
- the isolated plates are arranged in a plurality of rows and a plurality of columns;
- and
- the isolated plates of consecutive rows are arranged in a staggered configuration.
4 more elements
Dependencies are inferred from the claim text.