Method for substrate coating with particles and device for carrying out the method

A method of coating a substrate, wherein the method comprises:

• positioning a substrate surface of the substrate to be coated in a vacuum and in the direction of a region in which there are disposed solid particles with which the substrate surface is to be coated;
• and
• introducing electrons into the solid particles, which are disposed in the vacuum, for electrostatic charging of the solid particles in such a way that a force brought about by the electrostatic charging separates the solid particles from one another and accelerates them in the direction of the substrate surface of the substrate for coating of the substrate surface with at least a portion of the separated solid particles;
• and
• evaporating a coating material in the direction of the substrate surface for coating of the substrate surface with at least a portion of the coating material,
• wherein the coating of the substrate surface with at least a portion of the coating material and the coating of the substrate surface with at least the portion of the separated solid particles either:
• overlap in terms of time and/or space;
• or
• have a separation from one another in terms of time and/or space.