US 10,475,993 B1 · PCM RF switch fabrication with subtractively formed heater

Abstract

In fabricating a radio frequency (RF) switch, a heat spreader is provided and a heating element is deposited. A thermally conductive and electrically insulating material is deposited over the heating element. The heating element and the thermally conductive and electrically insulating material are patterned, where the thermally conductive and electrically insulating material is self-aligned with the heating element. A layer of an upper dielectric is deposited. A conformability support layer is optionally deposited over the upper dielectric and the thermally conductive and electrically insulating material. A phase-change material is deposited over the optional conformability support layer and the underlying upper dielectric and the thermally conductive and electrically insulating material.

Claims20

Dependent claims

A method of manufacturing a radio frequency (RF) switch, the method comprising:

providing a heat spreader;
depositing a heating element;
depositing a thermally conductive and electrically insulating material over said heating element;
patterning said heating element and said thermally conductive and electrically insulating material;
depositing a layer of an upper dielectric;
substantially planarizing said upper dielectric with said thermally conductive and electrically insulating material;
depositing a conformability support layer over said upper dielectric and said thermally conductive and electrically insulating material;
depositing a phase-change material over said conformability support layer.

5 more elements

Dependencies are inferred from the claim text.

PCM RF switch fabrication with subtractively formed heater

Life of this patent

PCM RF switch fabrication with subtractively formed heater

Life of this patent

Abstract

Claims20