Transparent ultraviolet photodetector
AssigneeInternational Business Machines Corporation
InventorsDamon Farmer, Shu-Jen Han
Life of this patent
Estimating the term…
Abstract
A method of fabricating a visibly transparent, ultraviolet (UV) photodetector is provided. The method includes laying a first electrode onto a substrate surface, the first electrode being formed of a carbon-based, single-layer material. A block is patterned over an end of the first electrode and portions of the substrate surface. The block is formed of a visibly transparent material that is able to be deposited into the block at 75° C.-125° C. In addition, the method includes masking a section of the block and exposed sections of the first electrode. A second electrode is laid onto an unmasked section of the block with an end of the second electrode laid onto the substrate surface. The second electrode is formed of the carbon-based, single-layer material.
Claims18
A method of fabricating a visibly transparent, ultraviolet (UV) photodetector, the method comprising:
- laying a first electrode onto a substrate surface, the first electrode being formed of a carbon-based, single-layer material;
- patterning a block over an end of the first electrode and portions of the substrate surface, the block being formed of a visibly transparent material that is able to be deposited into the block at 75° C.-125° C.;
- masking a section of the block and exposed sections of the first electrode;
- and
- laying a second electrode onto an unmasked section of the block with an end of the second electrode laid onto the substrate surface, the second electrode being formed of the carbon-based, single-layer material.
A method of fabricating a visibly transparent, ultraviolet (UV) photodetector, the method comprising:
- laying a first graphene electrode between a substrate surface and a first conductive contact;
- patterning a zinc oxide (ZnO) block over an end of the first graphene electrode and proximal portions of the substrate surface at a distance from the first conductive contact;
- masking complementary sections of the first conductive contact and the ZnO block;
- masking a region defined between the complementary sections of the first conductive contact and the ZnO block;
- laying a second graphene electrode onto an unmasked section of the ZnO block with an end of the second graphene electrode being laid onto the substrate surface;
- and
- assembling a second conductive contact onto the end of the second graphene electrode.
A visibly transparent, ultraviolet (UV) photodetector, comprising:
- a substrate surface;
- and
- a visibly transparent stack assembled on the substrate surface, the visibly transparent stack comprising:
- first and second graphene electrodes;
- and
- a zinc oxide (ZnO) block interleaved between the first and second graphene electrodes,
- wherein the first and second graphene electrodes are formed into strips which are narrower than the ZnO block.
Dependencies are inferred from the claim text.