Photovoltaic device and method of manufacturing same
AssigneeSharp Kabushiki Kaisha
InventorsTakeshi Mori, Yuta Matsumoto, Yoshitaka Zenitani
Life of this patent
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Abstract
A photovoltaic device includes a liquid-repelling layer between the edges of a first amorphous semiconductor layer and the edges of a second amorphous semiconductor layer. No such a liquid-repelling layer is provided between the first amorphous semiconductor layer and the second amorphous semiconductor layer, except between the edges of the first amorphous semiconductor layer and the edges of the second amorphous semiconductor layer. The semiconductor layer in the photovoltaic device is therefore precisely patterned.
Claims9
A method of manufacturing a photovoltaic device, comprising:
- preparing a semiconductor substrate having a first face and a second face opposite the first face;
- forming a first amorphous semiconductor layer of a first conductivity type on the second face of the semiconductor substrate;
- forming a liquid-repelling layer on the first amorphous semiconductor layer;
- applying an etching paste to the liquid-repelling layer;
- removing parts of the liquid-repelling layer and the first amorphous semiconductor layer using the etching paste;
- forming a second amorphous semiconductor layer of a second conductivity type above the first amorphous semiconductor layer and on those parts of the second face of the semiconductor substrate from which the first amorphous semiconductor layer has been removed, the second conductivity type differing from the first conductivity type, the second amorphous semiconductor layer having edges thereof over edges of the first amorphous semiconductor layer;
- removing parts of the second amorphous semiconductor layer;
- removing parts of the liquid-repelling layer;
- providing first electrodes in electric connection with the first amorphous semiconductor layer on the second face;
- and
- providing second electrodes in electric connection with the second amorphous semiconductor layer on the second face.
Dependencies are inferred from the claim text.