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US 10,475,940 B2Granted
Packaging glass with hierarchically nanostructured surface
AssigneeKing Abdullah University of Science and Technology
InventorsJr-Hau He, Hui-Chun Fu
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Abstract
An optical device includes an active region and packaging glass located on top of the active region. A top surface of the packaging glass includes hierarchical nanostructures comprised of honeycombed nanowalls (HNWs) and nanorod (NR) structures extending from the HNWs.
Claims16
An optical device comprising:
- an active region;
- and
- a packaging glass located adjacent to the active region to transmit incident light to the active region, wherein a surface of the packaging glass opposite the active region includes hierarchical nanostructures comprised of honeycombed nanowalls (HNWs) and nanorod (NR) structures extending from the HNWs.
A method of fabricating hierarchical nanostructures onto a packaging glass surface, the method comprising:
- depositing nanospheres on the packaging glass surface;
- coating the packaging glass surface, including the nanospheres, with a coating layer;
- removing the nanospheres from the packaging glass surface to expose uncoated portions of the packaging glass surface, wherein the coating layer acts as a first mask layer;
- conducting a first etching operation to etch the exposed uncoated portions of the packaging glass surface to create honeycombed nanowalls (HNWs) on the packaging glass surface, wherein the etching process also etches the coating layer to create coating islands on top of the HNWs, wherein the coating islands act as a second mask layer;
- conducting a second etching operation to etch exposed uncoated portions surrounding the coating islands to create nanorod (NR) structures on top of the HNWs.
2 more elements
Dependencies are inferred from the claim text.