Vertical tunnel field effect transistor (FET)
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKrishna Kumar Bhuwalka, Gerben Doornbos, Matthias Passlack
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKrishna Kumar Bhuwalka, Gerben Doornbos, Matthias Passlack
Estimating the term…
Among other things, one or more techniques for forming a vertical tunnel field effect transistor (FET), and a resulting vertical tunnel FET are provided herein. In an embodiment, the vertical tunnel FET is formed by forming a core over a first type substrate region, forming a second type channel shell around a circumference greater than a core circumference, forming a gate dielectric around a circumference greater than the core circumference, forming a gate electrode around a circumference greater than the core circumference, and forming a second type region over a portion of the second type channel shell, where the second type has a doping opposite a doping of the first type. In this manner, line tunneling is enabled, thus providing enhanced tunneling efficiency for a vertical tunnel FET.
A vertical tunnel field effect transistor (FET), comprising:
A vertical tunnel field effect transistor (FET), comprising:
A vertical tunnel field effect transistor (FET), comprising:
Dependencies are inferred from the claim text.