Tunnel field-effect transistor and fabrication method thereof

Abstract

Tunnel field-effect transistors and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate; forming a gate structure having a first side and an opposing second side on the semiconductor substrate; and forming a first doped source/drain layer in the semiconductor substrate at the first side of the gate structure. The first doped source/drain layer is doped with a first type of doping ions and a first contact interface between the first doped source/drain layer and the channel region has protruding structures protruding toward a channel region under the gate structure. The method also includes forming a second doped source/drain layer in the semiconductor substrate at the second side of the gate structure. The second doped source/drain layer is doped with a second type of doping ions having a conductivity opposite to the first doped source/drain layer.

Dependencies are inferred from the claim text.