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US 10,475,854 B2Granted
Manufacturing method of display device and thin-film deposition apparatus using the same
AssigneeSamsung Display Co., Ltd.
InventorsHeon Sik Ha, Kwang Hyun Kim, Sang Wook Lee
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Abstract
A method of manufacturing a display device, including: providing a display element layer on a substrate; forming a thin film encapsulation layer covering the display element layer; aging the thin film encapsulation layer by using a light source emitting artificial sunlight; and forming a window on the aged thin film encapsulation layer.
Claims18
A method of manufacturing a display device, comprising:
- providing a display element layer on a substrate;
- forming a thin film encapsulation layer covering the display element layer;
- aging the thin film encapsulation layer by using a light source emitting artificial sunlight;
- and
- disposing a window on the aged thin film encapsulation layer.
2 more elements
A method of manufacturing a display device, comprising:
- providing a display element layer on a substrate;
- forming a thin film encapsulation layer covering the display element layer;
- aging the thin film encapsulation layer by using a light source emitting artificial sunlight;
- and
- disposing a window on the aged thin film encapsulation layer,
- wherein the thin film encapsulation layer comprises a SiNx, and
- wherein in the aged thin film encapsulation layer, a peak area of a Si—H bond as measured by Fourier transform-infrared spectroscopy is reduced as compared with a peak area of a Si—N bond.
4 more elements
Dependencies are inferred from the claim text.