TFT array substrate, display device including the same, and method of manufacturing the same

A display device, comprising:

• a substrate;
• and
• a plurality of pixels arranged in an array on the substrate and including at least one TFT,
• wherein the TFT includes a semiconductor layer disposed on the substrate, an insulating layer disposed on the semiconductor layer, and a gate electrode disposed on the insulating layer,
• a top surface of a portion of the insulating layer overlapping the semiconductor layer and a top surface of the gate electrode are placed on a same level,
• the insulating layer covers the semiconductor layer, and
• a side surface of the gate electrode faces a side surface of the semiconductor layer.

A method of manufacturing a TFT array substrate, comprising:

• forming a semiconductor layer on a base substrate;
• forming an insulating layer on the semiconductor layer;
• forming a gate electrode on the insulating layer;
• and
• forming a source electrode and a drain electrode on the insulating layer,
• wherein the forming of the gate electrode comprises depositing a gate electrode material layer on the insulating layer, forming a gate electrode pattern layer by patterning the gate electrode material layer, and polishing the gate electrode pattern layer through chemical mechanical polishing (CMP),
• the insulating layer covers the semiconductor layer, and
• a side surface of the gate electrode faces a side surface of the semiconductor layer.

A thin-film transistor (TFT) array substrate, comprising:

• a base substrate;
• a semiconductor layer disposed on the base substrate;
• an insulating layer disposed on the semiconductor layer;
• and
• a gate electrode disposed on the insulating layer,
• wherein the gate electrode and the semiconductor layer are disposed not to overlap each other in a plan view of the base substrate, and
• the gate electrode is disposed adjacent to the semiconductor layer and overlaps the semiconductor layer in a direction parallel to a top surface of the base substrate.