Insulating structure and method of forming the same
AssigneesUnited Microelectronics Corp., Fujian Jinhua Integrated Circuit Co., Ltd.
InventorLi-Wei Feng
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Abstract
A method of forming insulating structures in a semiconductor device is provided in the present invention, which includes the steps of forming a first mask layer with mandrels and a peripheral portion surrounding the mandrels, forming spacers on sidewalls of first mask layer, filling up the space between spacers with a second mask layer, removing the spacers to form opening patterns, performing an etch process with the first mask layer and the second mask layer as an etch mask to form trenches in the substrate, and filling up the trenches with an insulating material to form insulating structures.
Claims4
An insulating structure in a semiconductor device, comprising:
- a substrate;
- a plurality of first insulating patterns in a loop shape and extending in a first longitudinal direction on said substrate, wherein said first insulating patterns intersect and physically and directly contact a plurality of bit lines extending in a second longitudinal direction different from said first longitudinal direction to define a plurality of contact holes cooperatively with said bit lines at the same height, and a plurality of storage node contact plugs formed in said contact holes defined by said first insulating patterns and said bit lines and electrically connecting storage nodes;
- and
- at least one second insulating pattern in a loop shape surrounding said first insulating patterns on said substrate, wherein said first insulating patterns in one said second insulating pattern are spaced apart from each other.
Dependencies are inferred from the claim text.