Substrate transfer hand

A substrate transfer hand comprising:

• a main hand body having a flat plate shape;
• a plurality of receiving members provided on the main hand body and configured to hold an edge of a substrate;
• and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving members and the gripping member and to fix the substrate;
• wherein the plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate;
• wherein the gripping member has a portion configured to grip the substrate in contact with the outer periphery of the substrate, the portion configured to grip the substrate comprising a columnar body having a curved surface;
• wherein the gripping member includes an upper portion having a thin edge-like upper end protruding outwardly from a lower portion of the gripping member to control upward rising of the substrate;
• and wherein the gripping member has a top surface that declines outwardly away from a location of the substrate to be gripped by the gripping member.

A substrate transfer hand comprising:

• a main hand body;
• a receiving member provided on the main hand body and configured to hold an edge of a substrate;
• and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving member and the gripping member and to fix the substrate;
• wherein the receiving member has a substrate outer periphery holding surface configured to hold an outer periphery of the substrate in contact with the outer periphery of the substrate, and a substrate lower surface holding surface configured to hold a lower surface of the substrate;
• wherein the substrate outer periphery holding surface and the substrate lower surface holding surface are spaced from each other;
• and wherein the gripping member having an upper portion having both a top surface and a bottom surface that each respectively declines outwardly away from a location of the substrate to be gripped by the gripping member.