Substrate loading system

An imprint lithography system, comprising:

• two or more pedestals of a pedestal platform;
• a substrate chuck having a top surface and a bottom surface, and including channels;
• a first tray and a second tray, each of the first and the second trays defining an aperture and each having a top surface, each aperture defining at least two cutouts and two tabs;
• a tray handler device including a first tray handler positioned opposite a second tray handler, the first tray handler engageable with the first tray and the second tray handler engageable with the second tray, the tray handler device rotatable between first and second positions, the first position having i) the cutouts of the aperture of the first tray in superimposition with respective pedestals of the pedestal platform and ii) a distal end of the pedestals extending away from the top surface of the first tray, the second position having i) the tabs defined by the aperture of the first tray in superimposition with respective channels of the substrate chuck and ii) the cutouts of the aperture of the second tray in superimposition with respective pedestals;
• and
• an actuator system to, when the tray handler device is in the first position, i) increase a distance between the top surface of the first tray and a top surface of the pedestal platform to transfer a first substrate from the pedestals to the tabs defined by the aperture of the first tray, while concurrently engaging the second tray handler with the second tray, and ii) increase a distance between the top surface of the second tray and the bottom surface of the substrate chuck to transfer a second substrate from the substrate chuck to the tabs defined by the second tray, and when the tray handler is in the second position, i) decrease a distance between the top surface of the first tray and the bottom surface of the substrate chuck to transfer the first substrate from the tabs defined by the aperture of the first tray to the top surface of the substrate chuck while the tabs defined by the aperture of the first tray are disposed within the respective channels of the substrate chuck, and ii) decrease a distance between the top surface of the second tray and the top surface of the pedestal platform to transfer the second substrate from the tabs defined by the aperture of the second tray to the pedestals while the first tray handler is disengaged from the first tray.