Method for charging gas into cassette pod
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-Yu Lai, Hung-Wen Chen
Life of this patent
Estimating the term…
Abstract
A method for transporting a cassette pod for containing semiconductor waters is provided. The method includes transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus. The method further includes supplying a gas from a cylinder into a housing of the cassette pod. The cylinder is externally positioned on the housing. The method also includes detecting a gas pressure in the cylinder with a detection element. In addition, the method includes issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit.
Claims20
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus;
- supplying a gas from a cylinder into a housing of the cassette pod, wherein the cylinder is externally positioned on the housing;
- detecting a gas pressure in the cylinder with a detection element;
- and
- issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower a redetermined limit.
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- processing a semiconductor wafer with a processing apparatus;
- placing the semiconductor wafer processed by the processing apparatus into a housing of a cassette pod;
- supplying a gas from a cylinder into the housing, wherein the cylinder is externally positioned on the housing;
- detecting a gas pressure in the cylinder with a detection element;
- and
- moving the cassette pod to a work station to replace the cylinder with another cylinder filled with the gas in response to a signal issued by the detection element when the gas pressure in the cylinder is lower than a predetermined limit.
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- placing a housing of a cassette pod on a gas purging assembly, wherein a gas inlet of the housing is connected to a gas spreading member of the gas purging assembly, and a gas is discharged from the gas purging assembly into the housing via the gas spreading member and the gas inlet;
- and
- removing the housing from the gas purging assembly and mounting a cylinder to an outer surface of a side fixed wall of the housing, wherein a tube is disposed outside of the housing and connects the cylinder to the gas inlet, and another gas is discharged from the cylinder into the housing via the tube and the gas inlet.
Dependencies are inferred from the claim text.