Semiconductor processing boat design with pressure sensor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAi-Tee Ang, Hsiu-Jen Lin, Wei-Hung Lin, Ming-Da Cheng, Chung-Shi Liu
Life of this patent
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Abstract
Presented herein is a device processing boat comprising a base and at least one unit retainer disposed in the base. The device further comprises a cover having at least one recess configured to accept and retain at least one unit. The at least one recess is aligned over, and configured to hold the at least one unit over, at least a portion of the at least one unit retainer. The cover is retained to the device processing boat by the at least one unit retainer. At least one pressure sensor having at least one sensel is disposed in the base. The sensel is configured to sense a clamping force applied by the cover to the at least one unit.
Claims20
A method of processing a device, the method comprising:
- placing a first unit in a first unit area on a top surface of a boat, the boat having a first unit retainer, a first portion of the first unit retainer laterally overlapping the first unit area, a second portion of the first unit retainer extending laterally beyond the first unit area;
- placing a cover over the first unit, the cover having a first opening extending from a top surface of the cover to a bottom surface of the cover, the first opening disposed over and exposing a first recess in the bottom surface of the cover, the first unit extending into the first recess, the cover being retained to the top surface of the boat by the first unit retainer, the cover clamping the first unit to the top surface of the boat;
- and
- attaching a top package to the first unit through the first opening.
A method of processing a device, the method comprising:
- placing a unit on a sensel disposed on a first side of a boat, the sensel configured to measure a pressure exerted thereon;
- and
- clamping a cover to the first side of the boat, the cover having a recess, the unit fitting into the recess of the cover and being clamped to the first side of the boat by the cover.
A method of processing a device, the method comprising:
- placing a unit on a sensel disposed in an unit area on a first side of a boat, the sensel configured to measure a pressure exerted thereon;
- and
- positioning a cover over the unit and over the first side of the boat, a lower side of the cover having a recess, the unit being retained in the recess of the cover, the cover being clamped on the unit by one or more unit retainers disposed in the boat.
Dependencies are inferred from the claim text.