Substrate processing apparatus, substrate processing method, and computer-readable recording medium having stored thereon substrate processing program

A computer-readable recording medium having stored thereon computer-executable instructions that, in response to execution, controls a substrate processing apparatus comprising a substrate rotating unit configured to hold and rotate a substrate;

• a processing liquid supplying unit configured to supply a first processing liquid to the substrate;
• a replacement liquid supplying unit configured to supply to the substrate a replacement liquid with which the first processing liquid supplied from the processing liquid supplying unit is replaced;
• and a processing liquid auxiliary-supplying unit configured to supply a second processing liquid to the substrate,
• wherein the computer-executable instructions cause the substrate processing apparatus to:
• rotate the substrate by the substrate rotating unit;
• supply the first processing liquid at a pre-determined supply flow rate to the substrate by the processing liquid supplying unit;
• form a liquid film of the replacement liquid by supplying the replacement liquid to the substrate by the replacement liquid supplying unit;
• and
• form a liquid film of the second processing liquid by supplying the second processing liquid from the processing liquid auxiliary-supplying unit to a position on the substrate positioned at an outer peripheral side thereof than a supply position of the replacement liquid on the substrate while the replacement liquid is supplied to the substrate,
• wherein the second processing liquid is supplied at a flow rate which is smaller than the pre-determined supply flow rate of the first processing liquid.