Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods

A ceramic layer for an electrostatic chuck, comprising:

• a top surface including an area configured to support a substrate;
• a primary radiofrequency (RF) power delivery electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface, the primary RF power delivery electrode configured to transmit RF power through the top surface at a frequency for generation of a plasma within a region above the top surface;
• at least one RF power delivery connection module disposed at least partially within the ceramic layer and configured to provide an electrically conductive path from a location outside the ceramic layer to the primary RF power delivery electrode, the at least one RF power delivery connection module connected to the primary RF power delivery electrode near a radial periphery of the primary RF power delivery electrode,
• wherein the at least one RF power delivery connection module and the primary RF power delivery electrode together form part of a Faraday cage to direct RF power transmission around an internal volume of the electrostatic chuck;
• and
• a clamp electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface, the clamp electrode positioned at a location between the primary RF power delivery electrode and the top surface, the clamp electrode configured to generate an electrical field for holding the substrate on the top surface.