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US 10,475,622 B2Granted
System and method for plasma ignition
AssigneeAdvanced Energy Industries, Inc.
InventorsJosh Pankratz, Craig Linn
Life of this patent
Estimating the term…
Abstract
This disclosure is generally directed to controlling energy distribution to a load, especially when anomalous events are detected. Benefits of the present disclosure include minimizing the length of a discharge event, mitigating the effects of an electrical discharge, and to improvements in inducing the ignition of a plasma. Methods and systems consistent with the present disclosure improve the control of operating conditions within a chamber and improve the ability for more rapidly initiating plasma ignition in a chamber.
Claims21
A method for igniting plasma in a direct current (DC) plasma system, the method comprising:
- providing an applied voltage to a low pressure environment plasma chamber of a DC powered plasma system at a first voltage level for a first time period, the first voltage level different from an operating DC voltage level of the plasma chamber;
- changing, prior to ignition of a plasma in the plasma chamber, the applied voltage provided to the plasma chamber to a second voltage level for a second time period, wherein the second voltage level is different from the operating DC voltage level of the plasma chamber and the operating DC voltage level is between the first voltage level and the second voltage level;
- returning the applied voltage to the plasma chamber to the first voltage level, wherein the voltage applied to the plasma chamber is alternated between the first voltage level and the second voltage level until the plasma is ignited in the plasma chamber;
- and
- providing, after the plasma is ignited in the plasma chamber and for a third time period, the applied voltage to the operating DC voltage level of the plasma chamber to maintain the plasma in the plasma chamber, wherein the third time period is longer than a combined first time period and second time period.
2 more elements
An apparatus for initiating plasma ignition in a direct current (DC) plasma system, the apparatus comprising:
- a controller;
- and
- the controller controls an applied voltage to a low pressure environment plasma chamber of the DC plasma system at a first voltage level for a first time period,
- the controller, prior to ignition of a plasma in the plasma chamber, changes the applied voltage provided to the plasma chamber to a second voltage level for a second time period by affecting an upper supply rail connection to the DC plasma system,
- the controller alternates the voltage applied to the plasma chamber between the first voltage level and the second voltage level by controlled connection of the upper supply rail to the DC plasma system until plasma is ignited at the plasma chamber, and
- the controller changes, after the plasma is ignited at the plasma chamber and for a third time period, the applied voltage to an operating DC voltage level of the plasma chamber to maintain the plasma in the plasma chamber, wherein the operating DC voltage level is between the first voltage level and the second voltage level and the third time period is longer than a combined first time period and second time period.
3 more elements
An apparatus for initiating plasma ignition in a direct current (DC) plasma system, the apparatus comprising:
- an upper rail and a lower rail that are disposed to form an electrical link between a low pressure environment DC plasma chamber and a first and a second output, respectively of a power supply;
- a plurality of switches that electrically couples a voltage changing circuit to at least one of the upper rail or the lower rail of the power supply when at least one of the plurality of switches are closed;
- and
- a control component coupled to the plurality of switches that controls switching between at least a first switch configuration and a second switch configuration, wherein the control component controls:
- the closure of at least a first switch of the plurality of switches to electrically couple the voltage changing circuit to at least one of the upper rail or the lower rail of the power supply to provide a first voltage to the DC plasma chamber for a first time period, the closure of the first switch corresponding to the first switch configuration,
- the first switch and a second switch of the plurality of switches to open or close according to the second switch configuration, the second switch configuration providing, prior to ignition of a plasma in the DC plasma chamber, a second voltage to the DC plasma chamber for a second time period,
- switching between the first switch configuration and the second switch configuration until the ignition of the plasma occurs based on switching between the first voltage and the second voltage provided to the DC plasma chamber, and
- the opening of the first switch and the second switch of the plurality of switches, after the plasma is ignited and for a third time period, to provide an operating DC voltage to the DC plasma chamber, wherein the third time period is longer than a combined first time period and second time period.
5 more elements
Dependencies are inferred from the claim text.