Drawing device and drawing method
AssigneeNuFlare Technology, Inc.
InventorsKei Hasegawa, Hayato Kimura, Hideo Inoue, Yoshiaki Onimaru
Life of this patent
Estimating the term…
Loading patent…
AssigneeNuFlare Technology, Inc.
InventorsKei Hasegawa, Hayato Kimura, Hideo Inoue, Yoshiaki Onimaru
Estimating the term…
A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.
A drawing device comprising:
A drawing method comprising:
Dependencies are inferred from the claim text.