Charged particle instruments
AssigneeNanoscope Services Limited
InventorLloyd Peto
Life of this patent
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Abstract
An apparatus is disclosed for use in a charged particle instrument which defines an inner volume therein. The apparatus comprises an adaptor (22) having a first portion adapted for attachment to a part (20) of a gas injection system (18) of a charged particle instrument which is located within an inner volume of such an instrument; and a second portion arranged to receive a tool (24) adapted for interaction with a sample (14) located in the inner volume of such an instrument.
Claims9
An adaptor for attachment to a nozzle of a gas injection system provided in an inner volume of a charged particle instrument, the adaptor having a first portion adapted for releasable attachment to the nozzle of the gas injection system of the charged particle instrument, which nozzle is located within an inner volume of such an instrument and comprises a body defining a gas injection pathway, and is operable to provide a gas injection function for the charge particle instrument concerned;
- and a second portion configured to receive a tool configured for interaction with a sample located in the inner volume of such an instrument, wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system but outside of the gas injection pathway without the provision of an additional apparatus within the inner volume, wherein the tool is configured to remove a portion of the sample.
A sample interaction apparatus for a charged particle instrument which defines an inner volume therein, the apparatus comprising:
- an adaptor having a first portion adapted for releasable attachment to a nozzle of a gas injection system of the charged particle instrument, which nozzle is located within the inner volume of such an instrument and comprises a body defining a gas injection pathway, and is operable to provide a gas injection function for the charge particle instrument concerned;
- and a tool attached to a second portion of the adaptor, the tool being configured for interaction with a sample located in the inner volume of such an instrument, wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system but outside of the gas injection pathway without the provision of an additional apparatus within the inner volume, wherein the tool is a manipulation needle, and wherein the tool is of a conductive, non-metallic material provided by a single carbon fibre.
An adaptor for attachment to a nozzle of a gas injection system provided in an inner volume of a charged particle instrument, the adaptor having a first portion adapted for releasable attachment to the nozzle of the gas injection system of the charged particle instrument, which nozzle is located within an inner volume of such an instrument and comprises a body defining a gas injection pathway, and is operable to provide a gas injection function for the charge particle instrument concerned;
- and a second portion configured to receive a tool configured for interaction with a sample located in the inner volume of such an instrument, wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system but outside of the gas injection pathway without the provision of an additional apparatus within the inner volume, wherein the tool is configured to move only a portion of the sample relative to the sample.
Dependencies are inferred from the claim text.