Multilayer X-ray source target
AssigneeGeneral Electric Company
InventorsYong Liang, Vance Scott Robinson, Thomas Robert Raber, George Theodore Dalakos
Life of this patent
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Abstract
The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers.
Claims18
An X-ray source, comprising:
- an emitter configured to emit an electron beam;
- and
- a target configured to generate X-rays when impacted by the electron beam, the target comprising:
- at least one X-ray generating layer of a single X-ray generating material, wherein the single X-ray generating material within the at least one X-ray generating layer varies in density within the respective at least one X-ray generating layer to have greater density in earlier deposited regions than in at least a portion of later deposited regions;
- and
- at least one thermally-conductive layer in thermal communication with each X-ray generating layer.
An X-ray source, comprising:
- an emitter configured to emit an electron beam;
- and
- a target configured to generate X-rays when impacted by the electron beam, the target comprising:
- one or more X-ray generating layers, at least one X-ray generating layer of the one or more X-ray generating layers of a single X-ray generating material, wherein the single X-ray generating material within the at least one X-ray generating layer has a density profile that decreases in at least one direction corresponding to a deposition sequence such that later deposited portions of the respective at least one X-ray generating layer are less dense;
- and
- at least one thermally-conductive layer in thermal communication with each X-ray generating layer.
A method for fabricating an X-ray source, comprising:
- depositing a single X-ray generating material on an underlying surface to form an X-ray generating layer, wherein the single X-ray generating material is deposited at one or both of different pressures or temperatures to have different densities at different depths within the X-ray generating layer;
- depositing a thermally conductive layer on the X-ray generating layer to form a thermally conductive layer;
- and
- positioning an emitter so that, when in use, an electron beam from the emitter impacts the X-ray generating layer and generates X-rays.
Dependencies are inferred from the claim text.