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US 10,475,601 B2Granted
Tunneling nanomechanical switches and tunable plasmonic nanogaps
AssigneeMassachusetts Institute of Technology
InventorsJeffrey H. Lang, Timothy M. Swager, Vladimir Bulovic, Farnaz Niroui, Ellen Sletten
Life of this patent
Estimating the term…
Abstract
Devices comprising at least two electrodes with a layer disposed therebetween are disclosed. In some embodiments, the layer disposed therebetween may be an insulator. In some embodiments, the layer may be capable of being deformed. Deforming the layer may cause a change in one or more materials properties of the device, such as the electrical properties and/or the optical properties of the device.
Claims31
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the device is a split drain device.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein both the first electrode and the second electrode have a surface roughness of less than or equal to 0.5 nm, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the device is a split drain device.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein deformation of the deformable layer causes a plasmon resonance wavelength to shift from a first wavelength to a second wavelength, and wherein the device is a split drain device.
1 more element
A method of operating a device, comprising:
- receiving or applying a force at at least one of a first electrode and a second electrode that deforms a deformable layer positioned between the first electrode and the second electrode such that the plasmon resonance wavelength shifts from a first wavelength to a second wavelength, and
- further comprising releasing the force, wherein releasing the force causes the plasmon resonance to shift from the second wavelength to the first wavelength.
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein at least one of the first electrode and the second electrode comprises graphene.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the first electrode comprises a nanocube.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the second electrode comprises a nanoplate.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the device comprises a third electrode that comprises a nanoplate.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein at least one of the first electrode and the second electrode are single crystalline.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- a third electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein a distance between the second electrode and the third electrode is less than or equal to 100 nm.
2 more elements
A device, comprising:
- a first electrode;
- a second electrode;
- a third electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein a distance between the first electrode and the second electrode is within 5% of a distance between the first electrode and the third electrode.
2 more elements
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the deformable layer comprises an organic molecule.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the deformable layer is adhered to one or more electrodes by a non-covalent interaction.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the deformable layer is adhered to one or more electrodes by a covalent interaction.
1 more element
A method of operating a device, comprising:
- receiving or applying a force at at least one of a first electrode and a second electrode that deforms a deformable layer positioned between the first electrode and the second electrode such that the plasmon resonance wavelength shifts from a first wavelength to a second wavelength,
- wherein applying the force comprises forming a potential difference between the first electrode and the second electrode.
A method of operating a device, comprising:
- receiving or applying a force at at least one of a first electrode and a second electrode that deforms a deformable layer positioned between the first electrode and the second electrode such that the plasmon resonance wavelength shifts from a first wavelength to a second wavelength,
- wherein applying a force comprises forming a potential difference between the second electrode and a third electrode.
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the device is a sensor.
1 more element
A device, comprising:
- a first electrode;
- a second electrode;
- and
- a deformable layer positioned between the first electrode and the second electrode, wherein the first electrode is electrically isolated, wherein the first electrode is a mechanically floating electrode, wherein the deformable layer is configured such that tunneling may occur between the first electrode and the second electrode when the deformable layer is compressed, and wherein the device is employed in a display application.
1 more element
Dependencies are inferred from the claim text.