Reduced shorts in magnetic tunnel junctions
AssigneeInternational Business Machines Corporation
InventorsAnthony Annunziata, Bruce B. Doris, Eugene J. O'Sullivan
Life of this patent
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Abstract
A technique relates to a magnetic device. A stack is formed including a magnetic tunnel junction (MTJ), the MTJ including a reference magnetic layer and a free magnetic layer sandwiching a tunnel barrier layer. A protective film is formed on a bottom portion of the MTJ such that an upper portion of the MTJ is exposed. A cleaning is performed on the upper portion of the MTJ that is exposed such that any residual material is removed.
Claims25
A method of cleaning a magnetic device, the method comprising:
- forming a stack including a magnetic tunnel junction (MTJ), the MTJ including a reference magnetic layer and a free magnetic layer sandwiching a tunnel barrier layer;
- forming a protective film on a bottom portion of the MTJ such that an upper portion of the MTJ is exposed, wherein a planarizing material is adjacent to the protective film, the planarizing material also being formed on the bottom portion of the MTJ such that the upper portion of the MTJ is exposed;
- and
- cleaning the upper portion of the MTJ that is exposed such that any residual material is removed.
A method of forming a magnetic device, the method comprising:
- forming a stack including a magnetic tunnel junction (MTJ), the MTJ including a reference magnetic layer and a free magnetic layer sandwiching a tunnel barrier layer;
- forming a protective film on a bottom portion of the MTJ such that an upper portion of the MTJ is exposed, wherein a planarizing material is adjacent to the protective film, the planarizing material also being formed on the bottom portion of the MTJ such that the upper portion of the MTJ is exposed;
- cleaning the upper portion of the MTJ that is exposed such that any residual material is removed;
- and
- forming a contact on the MTJ.
A magnetic device comprising:
- a stack including a magnetic tunnel junction (MTJ), the MTJ including a reference magnetic layer and a free magnetic layer sandwiching a tunnel barrier layer;
- a protective film formed on a bottom portion of the MTJ such that an upper portion of the MTJ is exposed;
- and
- another protective film formed in direct contact with the upper portion of the MTJ.
A method of cleaning a magnetic device, the method comprising:
- forming a magnetic tunnel junction (MTJ);
- forming a protective film on a portion of the MTJ such that another portion of the MTJ is exposed, wherein a planarizing material is adjacent to the protective film, the planarizing material also being formed on the portion of the MTJ such that the another portion of the MTJ is exposed;
- and
- cleaning the another portion of the MTJ that is exposed.
A magnetic device comprising:
- a magnetic tunnel junction (MTJ);
- and
- a protective film formed on a portion of the MTJ such that another portion of the MTJ is exposed, wherein one or more parts of the portion of the MTJ has redeposited material while the another portion is free of the redeposited material, wherein a planarizing material is adjacent to the protective film, the planarizing material also being formed on the portion of the MTJ such that the another portion of the MTJ is exposed.
Dependencies are inferred from the claim text.