Dual mode inspector

A method of dual mode inspection, comprising:

• (a) detecting the existence of a defect located at a first location on a sample without capturing an image;
• (b) determining if an image of the defect located at the first location on the sample is to be captured;
• (c) if it is determined that the image is to be captured in (b), then capturing an image of the defect located at the first location on the sample using a microscope that is not part of the optical inspector;
• (d) if it is determined that the image is not to be captured in (b), then not capturing an image of the defect located at the first location on the sample;
• (e) maintaining alignment of the sample to a platform that supports the sample between the detecting of (a) and the capturing of (c);
• and
• (f) storing the captured image on a storage device, wherein the captured image is associated with the detected defect.

A dual mode inspector, comprising

• an optical inspector that detects the existence of a defect located at a first location on a sample without capturing an image;
• a microscope that captures an image of the defect located at the first location on the sample, wherein the optical inspector and the microscope are included in a single enclosure, and wherein the captured image is not used to detect the existence of the defect;
• a first means for maintaining alignment of the sample on a platform during the time between detecting of the defect and the capturing of the image;
• and
• a second means for converting a second location where the optical inspector is setup to detect a defect on the sample to a first location on the sample where the defect is located.