Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device

A plasma processing apparatus comprising:

• a chamber;
• a top electrode and a bottom electrode, which are disposed in the chamber;
• a first power generator configured to apply a first signal to the top electrode to generate plasma in the chamber;
• and
• a second power generator configured to apply a second signal to the bottom electrode to control ion energy of the plasma, wherein the second power generator comprises at least one first signal generator configured to generate a square wave and at least one second signal generator configured to generate a slope voltage comprising a variable waveform during high periods of the square wave and comprising a constant voltage during low levels of the square wave, and the second signal has a designed waveform corresponding to a sum of the square wave and the variable waveform,
• wherein the at least one first signal generator is connected to the at least one second signal generator in a cascade manner.

A plasma processing apparatus comprising:

• a chamber;
• a top electrode and a bottom electrode, which are disposed in the chamber;
• a first power generator configured to apply a first signal to the top electrode to generate plasma in the chamber;
• and
• a second power generator configured to apply a second signal to the bottom electrode to control ion energy of the plasma, wherein the second power generator comprises:
• a first signal generator configured to generate a square wave;
• and
• a second signal generator including a transistor comprising an input terminal configured to receive the square wave as an input,
• wherein an output terminal of the transistor provides the second signal as periodic waveform having an increasing or decreasing slope when the first signal generator is inactivated, and
• wherein the output terminal provides the second signal as a sum of the square wave and the periodic waveform when the first signal generator is activated.