Optical element and optical arrangement therewith

An optical arrangement comprising at least one optical element and at least one thermal manipulation device, wherein the optical element comprises:

• a substrate, an overall coating applied to the substrate, the overall coating comprising:
• a reflective multi-layer coating configured to reflect radiation having a wavelength in an EUV wavelength range, and
• an antireflection coating arranged between the substrate and the reflective multi-layer coating and configured to suppress reflection of heating radiation having a heating wavelength that differs from the wavelength in the EUV wavelength range, and
• wherein the thermal manipulation device comprises at least one heating light source configured to produce the heating radiation,
• wherein the thermal manipulation device is configured to radiate the heating radiation through the substrate and onto the antireflection coating,
• wherein the antireflective coating is matched to properties of the substrate such that the antireflective coating has an antireflective effect on the heating radiation incident on the antireflective coating through the substrate, and
• wherein the suppression of the reflection of the heating radiation by the antireflection coating is maximal for a heating wavelength of more than 400 nm and less than 900 nm.