Optical scanning device, manufacturing method of optical scanning device, and optical scanning control device
AssigneeMitsumi Electric Co., Ltd.
InventorsYukihiro Yoshida, Koji Takenaka, Hisanori Aga
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Abstract
An optical scanning device that scans incident light by causing a mirror to oscillate is provided. The optical scanning device includes a displacement sensor for detecting a swing angle of the mirror and a temperature sensor used for temperature compensation of the displacement sensor. The displacement sensor is a piezoelectric sensor that has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order. The temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrode.
Claims9
An optical scanning device that scans incident light by causing a mirror to oscillate, the optical scanning device comprising:
- a displacement sensor configured to detect a swing angle of the mirror;
- and
- a temperature sensor used for temperature compensation of the displacement sensor, wherein
- the displacement sensor has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order, and
- the temperature sensor is a resistance type temperature measuring body having a same layer structure as the lower electrode.
A manufacturing method of an optical scanning device that scans incident light by causing a mirror to oscillate, the manufacturing method comprising:
- forming a displacement sensor that detects a swing angle of the mirror;
- forming a temperature sensor used for temperature compensation of the displacement sensor;
- forming a horizontal drive beam that includes a horizontal drive source for causing the mirror to oscillate in a horizontal direction;
- and
- forming a vertical drive beam that includes a vertical drive source for causing the mirror to oscillate in a vertical direction, wherein
- the displacement sensor, the horizontal drive source, and the vertical drive source are piezoelectric elements that have a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order,
- the temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrodes of the displacement sensor, the horizontal drive source, and the vertical drive source, and
- the temperature sensor is formed at the same time in a same process as the lower electrodes of the displacement sensor, the horizontal drive source, and the vertical drive source.
Dependencies are inferred from the claim text.