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US 10,473,912 B2Granted
Optical module and electronic apparatus having wavelength variable interference filter with voltage controller
AssigneeSeiko Epson Corporation
InventorTakeshi Nozawa
Life of this patent
Estimating the term…
Abstract
An optical module includes: a wavelength variable interference filter that includes two reflection films facing each other via an inter-reflection-film gap and an electrostatic actuator changing a gap amount of the inter-reflection-film gap; and a voltage controller that is driven in accordance with a plurality of supply voltages from a power supplier and applies a driving voltage to the electrostatic actuator. The voltage controller reduces the driving voltage when one of the plurality of supply voltages is less than a predetermined threshold.
Claims12
An optical module comprising:
- a wavelength variable interference filter that includes:
- two reflection films facing each other via an inter-reflection-film gap;
- and
- first and second electrostatic actuators changing a gap amount of the inter-reflection-film gap;
- and
- a voltage controller that is driven in accordance with a plurality of supply voltages from a power supplier, the plurality of supply voltages including the first, second, and third voltages that are different from each other, the voltage controller including:
- a microcontroller configured to receive the first voltage and output a bias signal and a target gap value of the gap amount;
- a gap detector configured to detect the gap amount and to output a detected gap amount;
- a bias driver configured to receive a second voltage and the bias signal, the bias driver being configured to supply a bias voltage to the first electrostatic actuator in response to the bias signal from the microcontroller so as to drive the first electrostatic actuator;
- and
- a feedback controller configured to receive the third voltage and the target gap value, the feedback controller being configured to supply a feedback voltage to the second electrostatic actuator in response to the target gap value from the microcontroller and the detected gap amount from the gap detector so as to drive the second electrostatic actuator,
- wherein, when the microcontroller detects that one of the first, second, and third voltages is less than a predetermined threshold, the microcontroller is configured to change each of the bias voltage and the feedback voltage to a value equal to or less than a predetermined value.
9 more elements
An electronic apparatus comprising:
- an optical module that includes;
- a wavelength variable interference filter that includes;
- two reflection films facing each other via an inter-reflection-film gap and;
- first and second electrostatic actuators changing a gap amount of the inter-reflection-film gap;
- and
- a voltage controller that is driven in accordance with a plurality of supply voltages from a power supplier, the plurality of supply voltages including first, second, and third voltages that are different from each other, the voltage controller including;
- a microcontroller configured to receive the first voltage and output a bias signal and a target gap value of the gap amount;
- a gap detector configured to detect the gap amount and to output a detected gap amount;
- a bias driver configured to receive a second voltage and the bias signal, the bias driver being configured to supply the bias voltage to the first electrostatic actuator in response to the bias signal from the microcontroller so as to drive the first electrostatic actuator;
- and
- a feedback controller configured to receive the third voltage and the target gap value, the feedback controller being configured to supply a feedback voltage to the second electrostatic actuator in response to the target gap value from the microcontroller and the detected gap amount from the gap detector so as to drive the second electrostatic actuator;
- and
- a module controller that controls the optical module,
- wherein, when the microcontroller detects that one of the first, second, and third voltages is less than a predetermined threshold, the microcontroller is configured to change each of the bias voltage and the feedback voltage to a value equal to or less than a predetermined value.
11 more elements
Dependencies are inferred from the claim text.