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US 10,473,861 B2Granted
Photonics grating coupler and method of manufacture
AssigneeMicron Technology, Inc.
InventorHarel Frish
Life of this patent
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Abstract
A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.
Claims10
A photonic coupler, comprising:
- a substrate having an upper surface;
- a photonic element disposed over the substrate;
- a sloped grating disposed over the substrate for redirecting light into or out of the photonic element, the sloped grating configured to redirect light from a horizontal direction substantially parallel to the upper surface of the substrate to a vertical direction substantially orthogonal to the horizontal direction;
- and
- a lower cladding disposed between the substrate and the photonic element, the lower cladding having a horizontal portion and a sloped portion.
2 more elements
A photonic coupler, comprising:
- a photonic element provided having a horizontal portion and a sloped portion;
- a sloped grating formed at sloped portion of the photonic element and configured to direct light into or out of the photonic element;
- a lower cladding disposed between the substrate and the photonic element, the lower cladding having a horizontal portion and a sloped portion;
- and
- an upper cladding disposed over the photonic element, the upper cladding having an upper surface that is substantially parallel to the horizontal portion of photonic element.
2 more elements
Dependencies are inferred from the claim text.