Measuring apparatus and measuring method
AssigneeToshiba Memory Corporation
InventorChikara Tanioka
Life of this patent
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AssigneeToshiba Memory Corporation
InventorChikara Tanioka
Estimating the term…
According to one embodiment, a beam splitter splits light into first light and second light. The second light is used to irradiate a sample containing particles. A first imaging device images a first interference pattern formed by multiplexing third light, which has been generated by irradiating the particles with the second light, and the first light. A second imaging device images a second interference pattern formed by the third light. An arithmetic device compares a composite image with a calculated image. The composite image is created by using a first interference image picked up by the first imaging device and a second interference image picked up by the second imaging device. The calculated image is obtained by combining single particle interference images, each of which is expected to be obtained by the first imaging device in a case where a particle is present alone in the sample.
A measuring apparatus comprising:
A measuring method comprising:
Dependencies are inferred from the claim text.