X-ray thin film inspection device

An X-ray thin film inspection device, comprising:

• a sample stage having an upper surface on which an inspection target is disposed;
• an image observing unit that is adapted to observe an image of the inspection target disposed on the upper surface of the sample stage;
• a positioning mechanism that is controlled based on an image observation result of the inspection target by the image observing unit to move the sample stage in two directions perpendicular to each other on a horizontal plane, the two directions being a height direction and an in-plane rotating direction;
• a goniometer having a first rotation member and a second rotation member that rotate along a virtual flat plane perpendicular to the upper surface of the sample stage;
• an X-ray irradiation unit installed on the first rotation member;
• an X-ray detector installed on the second rotation member;
• and
• a fluorescence X-ray detector that detects fluorescence X-rays generated from the inspection target upon irradiation of X-rays,
• wherein the X-ray irradiation unit comprises:
• an X-ray tube that radiates X-rays;
• and
• an X-ray optical element that is configured so that a double curved monochromator crystal plate comprising a semiconductor single crystal plate with a reflection surface having a high-order curved surface of a tertiary or higher order curved surface is fixed to a support block, makes X-rays radiated from the X-ray tube incident to the reflection surface and reflects focused X-rays monochromatized at a specific wavelength.

An X-ray thin film inspection device, comprising:

• a sample stage having an upper surface on which an inspection target is disposed;
• an image observing unit that is adapted to observe an image of the inspection target disposed on the upper surface of the sample stage;
• a positioning mechanism that is controlled based on an image observation result of the inspection target by the image observing unit to move the sample stage in two directions perpendicular to each other on a horizontal plane, the two directions being a height direction and an in-plane rotating direction;
• a goniometer having a first rotation member and a second rotation member that rotate along a virtual flat plane perpendicular to the upper surface of the sample stage;
• a plurality of X-ray irradiation units installed on the first rotation member;
• an X-ray detector installed on the second rotation member;
• and
• a fluorescence X-ray detector that detects fluorescence X-rays generated from the inspection target upon irradiation of X-rays,
• wherein the X-ray irradiation units comprise a first X-ray irradiation unit and a second X-ray irradiation unit,
• wherein the first X-ray irradiation unit comprises:
• a first X-ray tube that radiates X-rays;
• a first X-ray optical element comprising a confocal mirror that receives X-rays radiated from the X-ray tube, reflects a plurality of focused X-ray beams monochromatized at a specific wavelength, and focuses the plurality of focused X-ray beams to a preset focal point;
• and
• a slit mechanism that transmits therethrough an arbitrary number of focused X-ray beams out of the plurality of focused X-ray beams reflected from the X-ray optical element,
• wherein the second X-ray irradiation unit comprises:
• a second X-ray tube that radiates X-rays;
• and
• a second X-ray optical element that is configured so that a double curved monochromator crystal plate comprising a semiconductor single crystal plate with a reflection surface having a high-order curved surface of a tertiary or higher order curved surface is fixed to a support block, makes X-rays radiated from the X-ray tube incident to the reflection surface and reflects focused X-rays monochromatized at the specific wavelength, and
• wherein the X-ray irradiation units are installed on the first rotation member to be arranged in juxtaposition with each other in a rotation direction.