X-ray inspection apparatus

An X-ray inspection apparatus comprising:

• an X-ray source;
• an X-ray detector that is disposed to face the X-ray source with an inspection space interposed therebetween;
• a stage that is movable to any position in the inspection space by a three-dimensional movement mechanism;
• a dose rate calculation unit that obtains a reference dose rate for at least one position in the inspection space under a tube current and a tube voltage used as references, and stores the reference dose rate as reference dose rate data in advance, and calculates a dose rate at any position in the inspection space as inspection space dose rate data on the basis of the reference dose rate data by setting a tube current and a tube voltage used for inspection of an inspection target object;
• a stage face information storage unit that stores stage face information including a stage reference point defined for the stage and relative position information for defining a range of a stage face;
• an irradiation history monitoring unit that monitors a movement locus of the stage reference point at each time point from starting of X-ray irradiation to ending of X-ray irradiation, and stores the movement locus as irradiation history information;
• a stage face cumulative irradiation dose calculation unit that calculates a cumulative irradiation dose at each position on the stage face of the stage on the basis of the irradiation history information, the stage face information, and the inspection space dose rate data, and stores the cumulative irradiation dose as cumulative irradiation dose distribution data;
• a stage face imaging range calculation unit that calculates stage face imaging range data indicating a range of the stage face imaged by the X-ray detector at a position where an X-ray fluoroscopic image of the inspection target object is captured;
• and
• a dose distribution image display control unit that extracts cumulative irradiation dose distribution data for a region corresponding to the stage face imaging range data from the cumulative irradiation dose distribution data as imaging range cumulative dose distribution data, and displays an image of the imaging range cumulative dose distribution data on the display device,
• wherein a position of the stage is adjusted such that an observation region of the inspection target object placed on the stage face of the stage is located on an X-ray optical axis connecting the X-ray source to the X-ray detector, and then an X-ray fluoroscopic image of the inspection target object is captured and is displayed on a display device.