Piezoelectric pressure sensor with accommodation for thermal deformation
AssigneeMikuni Corporation
InventorTomoya Sato
Life of this patent
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AssigneeMikuni Corporation
InventorTomoya Sato
Estimating the term…
This pressure sensor is equipped with: a housing (10) having a tip tubular portion (11) that lengthens in the direction of an axis (S) and is exposed to a pressure medium; an output measurement unit (20) that includes a piezoelectric member (22) and is housed inside the housing; and a pressure transmission member for occluding the space for storing the output measurement unit in the housing, and transmitting the pressure from the pressure medium imparted in the axial direction to the output measurement unit. The pressure transmission member is a bottomed diaphragm having: an inner tubular portion (32) that is affixed to the tip portion of the tip tubular portion and lengthens in the axial direction toward the output measurement unit inside the tip tubular portion; and a pressure receiving bottom portion (33) that contacts the output measurement unit and is integrally formed with the inner tubular portion.
A pressure sensor comprising:
Dependencies are inferred from the claim text.