Hermetic pressure sensor having a bending part
AssigneeSensata Technologies, Inc.
InventorsFrank Hendri Jacobs, Wico Hopman, Jochem Hendrik Talsma, Jochem Christiaan Nijs, Erik Hop
Life of this patent
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Abstract
A hermetic pressure sensor for measuring a fluid pressure includes a hermetic housing, formed of a first housing structure with a membrane section, a second housing structure hermetically connected to the first structure, and one or more strain sensing elements attached to the membrane section. The second housing structure includes openings for one or more electrical pins while a non-conductive hermetic seal holds the electrical pins in place. The pressure sensor measures the pressure of fluid entering the housing while also providing a hermetic seal.
Claims18
A hermetic pressure sensor for measuring a fluid pressure comprising:
- a hermetic housing including:
- a first housing structure;
- a second housing structure hermetically connected to the first housing structure to form an interior;
- a membrane section within the interior, the membrane section arranged to be exposed to the fluid pressure;
- and one or more strain sensing elements arranged in the interior and attached to the membrane section;
- and
- an annular wave-like section disposed between and connecting the membrane section to the first housing structure to form a mechanical path between the membrane section and the hermetic housing to reduce the effect of non-uniform forces on the hermetic housing on an output signal from the one or more strain sensing elements,
- wherein the second housing structure includes:
- a housing part, the housing part having at least two openings with an electrical connection pin passing through each of the at least two openings, the electrical pins being affixed in the respective openings by a non-conductive and hermetic sealing material.
A hermetic pressure sensor for measuring a fluid pressure comprising:
- a hermetic housing including:
- a first housing structure;
- a second housing structure hermetically connected to the first housing structure to form an interior;
- a membrane section within the interior, the membrane section arranged to be exposed to the fluid pressure;
- and one or more strain sensing elements arranged in the interior and attached to the membrane section,
- wherein:
- the second housing structure includes:
- a housing part, the housing part having at least two openings with an electrical connection pin passing through each of the at least two openings, the electrical pins being affixed in the respective openings by a non-conductive and hermetic sealing material;
- the first housing structure includes:
- an annular support section;
- an annular base part;
- an annular bending part having a first thickness;
- and an annular rigid part having a second thickness, said second thickness being greater than the first thickness;
- and
- the annular support section connects the annular base part to the annular bending part and the annular rigid part connects the membrane section to the annular bending part to enlarge a mechanical path between the membrane section and the hermetic housing, thereby reducing the effect of forces on the hermetic housing on the one or more strain sensing elements.
A hermetic pressure sensor for measuring a fluid pressure comprising:
- a first housing structure having a generally annular shape including:
- an annular outer part;
- a base part defining a pressure supply opening for allowing the entry of a fluid;
- a cavity for containing the fluid at the fluid pressure;
- a membrane part having a fluid facing outer surface, the fluid facing outer surface being exposed to the fluid pressure;
- and one or more strain sensing elements arranged in contact with the membrane part;
- and
- a second housing structure having a generally annular shape and being hermetically connected to the first housing structure, including:
- a housing part defining two or more openings;
- two or more electrical connection pins passing, each pin passing through one of the two or more openings;
- a non-conductive and hermetic sealing material disposed to secure the two or more electrical pins in place with respect to the two or more openings;
- wherein:
- the strain sensing elements measure the fluid pressure within the cavity while the first and second housing structures provide a hermetic seal;
- and
- the first housing structure includes an annular wave-like section disposed between and connecting the membrane part and the annular outer part to form, a mechanical path between the membrane section and the outer surfaces of the hermetic housing.
Dependencies are inferred from the claim text.