Spatially resolved optical emission spectroscopy (OES) in plasma processing
AssigneeTokyo Electron Limited
InventorsChing-Ling Meng, Holger Tuitje, Yan Chen, Mihail Mihaylov
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Abstract
Disclosed is a method, system, and apparatus for optical emission measurement. The apparatus includes a collection system for collecting a plasma optical emission spectra through an optical window disposed at a wall of a plasma processing chamber. The optical system includes a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber; and a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.
Claims20
An apparatus for optical emission measurement, the apparatus comprising:
- a plasma processing chamber;
- an optical window disposed on a wall of the plasma processing chamber;
- and
- a collection system for collecting a plasma optical emission spectra through the optical window, the collection system including:
- a mirror system configured to scan a plurality of non-coincident rays across the plasma processing chamber;
- and
- a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra, wherein a center of rotation of the plurality of non-coincident rays is substantially at the optical window.
A system for plasma processing, comprising:
- a plasma processing chamber;
- an optical window disposed on a wall of the plasma processing chamber;
- a collection system for collecting plasma optical emission spectra through the optical window;
- a spectrometer coupled to the collection system for measuring the plasma optical emission spectra;
- and
- wherein the collection system includes
- a mirror system configured to scan a plurality of non-coincident rays across the plasma processing chamber, and
- a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to the spectrometer, wherein a center of rotation of the plurality of non-coincident rays is substantially at the optical window.
A method for optical emission measurement, comprising:
- depositing an optical window at a wall of a plasma processing chamber;
- providing a collection system for collecting plasma optical emission spectra through the optical window, the collection system including a mirror system and a telecentric coupler;
- scanning a plurality of non-coincident rays across the plasma processing chamber using the mirror system;
- collecting an optical signal from a plasma via the telecentric coupler;
- and
- directing the optical signal to a spectrometer for measuring the plasma optical emission spectra, wherein a center of rotation of the plurality of non-coincident rays is substantially at the optical window.
Dependencies are inferred from the claim text.