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US 10,473,522 B2Granted
Spectrometer
AssigneeMKS Technology
InventorsMark Watson, Shane Buller, Keith Carron
Life of this patent
Estimating the term…
Abstract
A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
Claims17
A spectrometer comprising:
- an excitation source for providing an excitation signal;
- a detector for detecting a spectroscopy signal;
- and
- an optical system for directing an incident beam of the excitation signal toward a sample, receiving the spectroscopy signal from the sample, and providing the spectroscopy signal to the detector, wherein the optical system comprises:
- a focusing lens for focusing the incident beam from the excitation source;
- a rotating mirror assembly including an angled mirror face surface;
- and
- an actuator assembly for controlling the rotating mirror assembly to move a focused incident beam across a surface of the sample, wherein the actuator assembly comprises a rotary motor coupled to the rotating mirror assembly and adapted to rotate the angled mirror face to redirect an incident beam of the excitation signal,
- wherein the rotary motor is coupled to the rotating mirror assembly via a drive shaft of the rotary motor and the rotating mirror assembly is coupled to the drive shaft of the rotary motor via a flexible mount.
6 more elements
A method of moving a focused incident beam of a spectrometer across a surface of a spectroscopic sample, the method comprising:
- generating an incident beam of an excitation signal;
- directing the incident beam towards the sample via an optical system of the spectrometer;
- focusing the incident beam on a sample of the spectrometer;
- moving the incident beam across a surface of the sample by rotating a rotating mirror assembly coupled to a drive shaft of a rotary motor by rotating the drive shaft, wherein the rotating mirror assembly is coupled to the drive shaft of the rotary motor via a flexible mount;
- receiving a spectroscopic signal from the sample;
- and
- detecting the spectroscopic signal.
4 more elements
Dependencies are inferred from the claim text.