Single-chip off-axis magnetoresistive Z-X angle sensor and measuring instrument

A single-chip off-axis magnetoresistive Z-X angle sensor, used for detecting a magnetic field rotation angle on a plane perpendicular to a substrate surface, wherein the Z-X angle sensor comprises:

• a substrate located on an X-Y plane;
• at least one X-axis magnetoresistive sensor located on the substrate, for detecting an X-axis magnetic field component parallel to the substrate surface;
• and
• at least one Z-axis magnetoresistive sensor located on the substrate, for detecting a Z-axis magnetic field component perpendicular to the substrate surface;
• wherein the X-axis magnetoresistive sensor and the Z-axis magnetoresistive sensor each comprise a magnetoresistive sensing unit and a flux concentrator, the flux concentrator is elongated with the major axis being parallel to a Y-axis direction and the minor axis being parallel to an X-axis direction, and a sensitive direction of the magnetoresistive sensing unit is parallel to the X-axis direction;
• wherein the magnetoresistive sensing unit of the Z-axis magnetoresistive sensor and the magnetoresistive sensing unit of the X-axis magnetoresistive sensor are each electrically connected into a magnetoresistive bridge comprising at least two bridge arms, wherein each of the bridge arms is a two-port structure formed by one or more of the magnetoresistive sensing units through electrical connection, and the magnetoresistive sensing units in the bridge arm are arranged into a plurality of magnetoresistive unit columns along a direction parallel to a Y axis;
• and
• wherein the magnetoresistive bridge of the Z-axis magnetoresistive sensor is a push-pull bridge, wherein a push arm and a pull arm are located on different sides of a Y-axis central line above or below the flux concentrator in the Z-axis magnetoresistive sensor, respectively, and equidistant from the Y-axis central line corresponding thereto;
• the magnetoresistive bridge of the X-axis magnetoresistive sensor is a reference bridge, wherein a reference arm is located at a position on a Y-axis central line above or below the flux concentrator in the X-axis magnetoresistive sensor, and a sensitive arm is located at a position more than half of the width of the flux concentrator away from the Y-axis central line above or below the flux concentrator in the X-axis magnetoresistive sensor.