Connection structure, magnetic annealing device using same, and connecting method

A magnetic annealing apparatus comprising:

• a housing;
• a magnetic annealing furnace that is provided with a fixedly arranged magnet;
• and
• a connection structure that connects the housing to the magnetic annealing furnace, the connection structure including:
• a first drum flange that is attached and fixed to the magnetic annealing furnace and includes a first flange portion having a cylindrical shape;
• a second drum flange that is attached and fixed to the housing and includes a second flange portion having a cylindrical shape configured to externally or internally fit the first flange portion of the first drum flange thereto in order to connect the housing to the magnetic annealing furnace;
• a first sealant that is installed between surfaces of the housing and the second drum flange which are opposite to each other in an axial direction of the first drum flange and the second drum flange, in order to hermetically connect the housing and the magnetic annealing furnace permanently in the axial direction;
• and
• a second sealant that is installed between surfaces of the first flange portion and the second flange portion which are opposite to each other in a diametrical direction of the first drum flange and the second drum flange, when the first drum flange and the second drum flange are hermetically connected in the diametrical direction for the magnetic annealing furnace to be closed by the housing.

A method of connecting, the method comprising:

• providing a first drum flange that is attached and fixed to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first flange portion having a cylindrical shape;
• semi-fixing a second drum flange, which includes a second flange portion having a cylindrical shape configured to externally or internally fit the first flange portion of the first drum flange thereto in order to connect a housing to the magnetic annealing furnace, and an attachment portion having a planar surface expanding vertically to a surface of the second flange portion from one end of the second flange portion, to an outer wall of the housing via a first sealant by using a fixing member in order to hermetically connect the housing and the magnetic annealing furnace permanently in an axial direction of the first drum flange and the second drum flange;
• installing a second sealant on the second flange portion of the second drum flange;
• fitting the second drum flange to the first drum flange via the second sealant in order to hermetically connect the second drum flange to the first drum flange in a diametrical direction of the first drum flange and the second drum flange;
• and
• fixing the second drum flange to the outer wall of the housing by using the fixing member for the magnetic annealing furnace to be closed by the housing.