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AssigneeOxford Instruments Nanotechnology Tools Limited
InventorsJohn Garside, Matthias Buehler, Daniels Tortorella, Xing Yuan
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Apparatus for controlling a cryogenic cooling system is described. A supply gas line (3A) and a return gas line (3B) are provided which are coupled to a compressor (1) and to a mechanical refrigerator (2) via a coupling element (4). The coupling element is in gaseous communication with the supply (2A) and return gas lines and supplies gas to the mechanical refrigerator (2). The pressure of the supplied gas is modulated by the coupling element in a cyclical manner. A pressure sensing apparatus (6) monitors the pressure in at least one of the supply and return gas lines. A control system (5) is used to modulate the frequency of the cyclical gas pressure supplied by the coupling element in accordance with the pressure monitored by the pressure sensing apparatus. An associated method of controlling such a system is also described.
A method of controlling a cool-down process of a cryogenic cooling system, the cryogenic cooling system comprising a supply gas line and a return gas line for coupling with a compressor, a rotary valve in gaseous communication with the supply and return gas lines that supplies gas to a pulse tube refrigerator and cyclically modulates the pressure of the supplied gas so that the pressure varies at a given frequency, and a motor that drives the rotary valve, the method comprising:
Dependencies are inferred from the claim text.