Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component

A method of forming a pipe joint including

• a first hollow pipe member with a first flange portion,
• a second hollow pipe member with a second flange portion, and
• a casing for connecting the first and second pipe members with a seal created between the first and second flange portions, characterized by
• preparing a plate-like pressing member for pressing the second flange portion against the first flange portion,
• preparing the casing to have a first end wall, a second end wall opposite the first end wall, a first side wall between the first and second end walls, a flange receiving space inside, and a receiving space inside adapted to receive the pressing member, the first end wall having a first opening, the second end wall having a second opening, the first side wall having a third opening, the flange receiving space being in communication with the first and second openings, the receiving space being in communication with the flange receiving space, and allow the first pipe member to be inserted from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space,
• inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion, and
• inserting the pressing member through the third opening into the receiving space to press the second flange portion against the first flange portion, thereby creating a seal between the first and second flange portions.