US 10,472,273 B2 · Sensitized, photo-sensitive glass and its production

Abstract

A sensitized, photo-structurable glasses and methods for producing are provided. The glasses includes Si4+, one or more crystal-agonist, one or more crystal-antagonist, and one or more pair of nucleating agents. The glasses are sensitized in that the glass reacts more sensitive to irradiation with UV-light and can be crystallized easier and with higher aspect ratios than a non-sensitized glass with equal composition. Furthermore, the sensitized glasses of this invention have smaller crystal sizes after irradiation and tempering than a non-sensitized glass with equal composition. The invention also relates to a structured glass product. Such product can be obtained by submitting the crystallized glass product to a subsequent etching step. The structured product can be used in components or as component for the application fields micro-technology, micro-reaction-technology, electronic packaging, micro-fluidics, FED spacer, bio-technology, interposer, and/or three-dimensional structured antennae.

Claims19

Dependent claims

A photo-structurable glass, which comprises Si4+, one or more crystal-agonist, one or more crystal-antagonist and one or more pair of nucleating agents,

wherein the crystal-agonists are selected from Na+, K+, and Li+,
wherein the crystal-antagonists are selected from Al3+, B3+, Zn2+, Sn2+ and Sb3+,
wherein the pair of nucleating agents comprises cerium and at least one agent from the group of silver, gold and copper,
wherein the molar proportion of the crystal-agonists in cat.-% in relation to the molar proportion of Si4+ is at least 0.3 and at most 0.85, and
wherein the glass has a position accuracy value of less than or equal to 0.3%.

2 more elements

Dependencies are inferred from the claim text.

Sensitized, photo-sensitive glass and its production

Life of this patent

Sensitized, photo-sensitive glass and its production

Life of this patent

Abstract

Claims19