Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box

A treatment device, comprising:

• a treatment chamber for treatment with treatment fluids of a plurality of types;
• an exhaust switching unit formed of a distribution box, a plurality of switching valve boxes, and an exhaust tube;
• and
• an exhaust pipe connected on one side to inside of the treatment chamber and connected on another side to the exhaust switching unit,
• wherein
• each of the switching valve boxes in the exhaust switching unit corresponds to one of the types of the treatment fluids,
• the distribution box includes on one side a first connecting part connected to the exhaust pipe and on another side second connecting parts connected respectively to the plurality of switching valve boxes in a parallel state,
• the distribution box is connected to the exhaust pipe by the first connecting part and connected to each of the switching valve boxes by the second connecting parts connected in the parallel state which are positioned in an exhaust direction thereof with respect to the one side,
• the distribution box includes a channel between the first connecting part and the second connecting parts,
• each of the switching valve boxes has an air induction duct on a portion of the switching valve box,
• the air induction duct extends in a direction perpendicular to an exhaust direction of the switching valve box and includes an exit,
• inside each of the switching valve boxes is an exhaust channel, and a switching valve,
• the switching valve opens or closes the exhaust channel which purges an exhaust from the treatment chamber and the distribution box to the switching valve box,
• the switching valve opens the air induction duct when closing the exhaust channel, and
• the switching valve opens the exhaust channel when closing the air induction duct, and
• the treatment device further comprises for each of the switching valve boxes an air intake port introducing air from outside the treatment device into the switching valve box, and a relief valve opening or closing the air intake port, and
• wherein
• the relief valve automatically opens the air intake port by a negative pressure due to suction created in the exhaust tube when closing the exhaust channel and by atmospheric pressure, and the relief valve automatically closes the air intake port by an action of gravity,
• the treatment device further comprises for each of the switching valve boxes an air induction box connected to the switching valve box so as to cover the air induction duct,
• the air intake port is provided on a side of the air induction box, and
• the relief valve is a swing type valve, whose vertical upper side is mounted to the air induction box.