Inspection unit, inspection method, and substrate treating apparatus including the same

A substrate treating apparatus, comprising:

• a treatment unit configured to treat the substrate, the treatment unit comprising a container, and a support member situated in an interior of the container to support a substrate;
• a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit;
• and
• an inspection unit configured to inspect whether the treatment liquid is normally discharged from the treatment liquid nozzle,
• wherein the nozzle unit further comprises a nozzle driver configured to move the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit, and
• wherein the inspection unit includes,
• a plate of a transparent material, the plate being positioned vertically below the nozzle unit at the inspection position,
• a photographing member positioned underneath the plate,
• a light source member configured to irradiate light onto a path of the treatment liquid discharged from the treatment liquid nozzle onto the plate at the inspection position, and
• a determination member configured to determine whether the treatment liquid is normally discharged, from an image photographed by the photographing member,
• wherein the light source member and the photographing member are arranged such that a direction in which the light is irradiated onto the treatment liquid and a direction in which the photographing member is configured to photograph the treatment liquid are perpendicular to each other.